High power impulse magnetron sputtering of tungsten: a comparison of experimental and modelling results
نویسندگان
چکیده
Abstract Here, we compare the ionization region model (IRM) against experimental measurements of particle densities and electron temperature in a high power impulse magnetron sputtering discharge with tungsten target. The semi-empirical provides volume-averaged temporal variations various species as well energy for particular cathode target material, when given measured current voltage waveforms. results are compared to evolution density determined by Thomson scattering relative neutral ion optical emission spectrometry. While underestimates overestimates temperature, trends captured IRM.
منابع مشابه
High power impulse magnetron sputtering discharge
J. T. Gudmundsson, N. Brenning, Daniel Lundin and Ulf Helmersson, High power impulse magnetron sputtering discharge, 2012, Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, (30), 030801. http://dx.doi.org/10.1116/1.3691832 Copyright: American Vacuum Society, This article may be downloaded for personal use only. Any other use requires prior permission of the author and the ...
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ژورنال
عنوان ژورنال: Plasma Sources Science and Technology
سال: 2023
ISSN: ['1361-6595', '0963-0252']
DOI: https://doi.org/10.1088/1361-6595/acc12f